Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, Electrostatic Chuck Power Supplies, High Voltage Power Supplies, Control Sytems, Vacuum Systems

Amazing capability in miniature packages that fit into the palm of one hand ...

High voltage power supplies with

6-output 3-phase all solid-state bipolar outputs up to +/-6kV, 3mA;

Sensitive capacitance measurements on high voltage lines

for accurate substrate position determination;

Voltage and current feedback on high voltage lines with 1nA current resolution;

Control and powering of sensors and actuators both at chuck and host controller locations;

RH at electronics bench

Please contact Electrogrip with your needs; we likely have already developed a solution.