Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, Electrostatic Chuck Power Supplies, High Voltage Power Supplies, Control Sytems, Vacuum Systems

THERMAL DESIGN FROM ELECTROGRIP ...

Obtain a complete solution meeting thermal control needs:

Mechanical Design ...

heater chamber closeup

 

Theory ...

integrated emittancestransient temperatures

 

Simulation ...

linear gap simul circular gap simul

 

... Then, On-Site System Qualification Assures Performance

 

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