Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, Electrostatic Chuck Power Supplies, High Voltage Power Supplies, Control Sytems, Vacuum Systems

Mobile ESC Charging Station -

for Electrostatic Wafer Carriers in Process Chambers

Do you need to process WAFER FRAGMENTS / INDIVIDUAL DIE?

... Charge a mobile carrier wafer to grip a process wafer or wafer portions,

then put the wafer sandwich through process steps requiring carrier wafer support

150mm wafer system shown below ...

Handles bipolar or monopolar wafer carriers, notched or flatted ...

 

Other wafer size systems are also available.

Electrogrip's MESC Mobile ESC Charging Station Features ...