Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, Electrostatic Chuck Power Supplies, High Voltage Power Supplies, Control Sytems, Vacuum Systems

High Rate, Low Pressure, High Density Plasma Etch / Deposition System

Selective Etching with Angle Control ...

Oxide on Silicon Angled Etch

Gap-Filling Deposition of Silicon or Silicon Dioxide ...

Gap Fill over Al Lines on Si

In a Self-Cleaning and Compact Hollow Cathode Single-Wafer Chamber...

Processing for 76mm - 200mm wafer diameters in a compact system

with electrostatic chucking and easy chamber maintenance ...

System Features;