Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, Electrostatic Chuck Power Supplies, High Voltage Power Supplies, Control Sytems, Vacuum Systems

Future-Proof your 384T 200mm systems

... while also permitting use of 150mm wafers ...

 

Change to plasma-cleanable chuck systems with long life and superb uniformity

 

Complete retrofit kit yields simple maintenance and guaranteed performance ...

 

... with all consumable rings and replacement parts available.

 

 

 

Below is shown a robust rf gas break assembly;