Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, Electrostatic Chuck Power Supplies, High Voltage Power Supplies, Control Sytems, Vacuum Systems

Gas Flow Control

Electrogrip provides system and component-level solutions:

 

Electrostatic chuck controls must be coordinated with gas backfill and wafer lift.

The GC-3 system controller permits an existing system to

 

Reliable, Wide-Range Gas Flow Control

Electrogrip's GFC-2 flow controller replaces standard MFC's and features: