Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, Electrostatic Chuck Power Supplies, High Voltage Power Supplies, Control Sytems, Vacuum Systems

A NEW CONCEPT IN GAS FLOW CONTROL

Here is a SELF-CALIBRATING, GAS-INDEPENDENT, UNFOULABLE GFC ...

GFC photo

Easily REPLACE these MFCs which can foul, lose calibration, and are gas-dependent ...

MFCs of standard design

Electrogrip's GFC-2 flow controller features:

The GFC series enables quick interchange with standard MFCs:

GFC RS serial type

The GFC series is available with

For more information, please request GFC data.

 

HOW IT WORKS ...

COMPARE WITH Mass Flow Controllers (MFCs), which use an indirect thermal transfer method to estimate gas flow.

MFCs are gas-dependent, position sensitive, exhibit zero drift, are easily contaminated, and are sensitive to upstream pressure variations;

MFC construction

The GFC has few internal components, but uses fundamental principles to determine gas flow in real time;

 

 

GFC internal construction

GFC flow control uses a small cyclic pressure variation in its Flow Sense Volume; this ~0.1% pressure variation yields real-time, absolutely calibrated gas flow with unmeasurably small downstream flow and pressure variations.

GFC pressure oscillation method

RESULT: Gas flow rate is dynamically controlled, independent of zero drift, gas type, system fouling, upstream pressure, GFC orientation, etc.