Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, High Voltage Power Supplies, Control Sytems, Vacuum Systems

Cylindrical test chambers are available with ISO100 and ISO25 ports

for 200mm and 125mm CP chuck assemblies, an ISO250 chamber ...

... and for 300mm, 200mm, and 125mm CP chuck assemblies, an ISO500 chamber...

 

Custom vacuum systems, and retrofits into existing systems, are also available.

Electrogrip has extensive in-house and customer system design experience ...

DepEtchPro control software permits rapid automation, without programming: