Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, High Voltage Power Supplies, Control Sytems, Vacuum Systems

Wafer Lift Pneumatic Actuators and Motors

 

Pneumatic lift assembly in a PVD system retrofit ...

magnetic coupling to the in-vacuum lift rod, and rf isolation:

Pneumatic lift actuator, Endura

 

3-Phase BLDC Servo drives are also available for precision wafer lift with:

Outrider Linear Actuator with 1 micron precision