Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, High Voltage Power Supplies, Control Sytems, Vacuum Systems

Shield boxes ...

Electrostatic chucks in radio-frequency plasma process chambers require

shielded base connections in a shielding 'Interface Enclosure'.

 

 

The shield box below has central heater rf filter coils, and electronics boxes.

Interface Enclosure with Heater Filter

 

 

Shield boxes may also be custom-designed for more complex applications.

Complex Interface Enclosure

 

 

Typical shield box setup with

Backpressure controls:

  • sensor,
  • flow control, and
  • bypass valving.

Electronics:

  • lift motor filters,
  • DR6VI chuck high voltage drive, and
  • interlock switching.
  • On the far or bottom side an rf match network would be attached.

Interface Enclsoure with Sensors