Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, High Voltage Power Supplies, Control Sytems, Vacuum Systems

Shield boxes, Gas Breaks, Motors ...

Electrostatic chucks in radio-frequency plasma process chambers require

shielded base connections in a shielding 'Interface Enclosure'.

Interface Enclosure with Heater Filter

Chuck backpressure gas lines require an insulating 'Gas Break'

to prevent unwanted discharges.

Gas Break, GB3 angled

Motor Actuators suitable for UHV / EUV chambers are also available in a number of styles.

This linear actuator yields 1 micron position readout with 20N force.

Outrider Linear Actuator with 1 micron precision