Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, High Voltage Power Supplies, Control Sytems, Vacuum Systems

Future-Proof your 384T 200mm systems

... while also permitting use of 150mm wafers ...

 

Change to plasma-cleanable chuck systems with long life and superb uniformity

 

Complete retrofit kit yields simple maintenance and guaranteed performance ...

 
... with all consumable rings and replacement parts available.