Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, High Voltage Power Supplies, Control Sytems, Vacuum Systems

Gas Flow Control

Electrostatic chuck controls must be coordinated with gas backfill and wafer lift.

Electrogrip provides solutions where existing controls are not available:

The GC-3 system controller permits an existing system to

Electrogrip's GFC-2 flow controller features: