Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, High Voltage Power Supplies, Control Sytems, Vacuum Systems

The DR4 driver is a high-voltage power supply with

The DR4 requires a BD3 filter at the chuck location for rf applications.

The DR4 can communicate using its

DR4 driver front panel

The DR4 has wafer sense outputs which allow wafer location to be used for robotic control.

Download the DR4 Manual.