Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, High Voltage Power Supplies, Control Sytems, Vacuum Systems

The BD3 'bias decoupler' filter removes radio-frequency high-voltage chuck signals

from chuck powering lines, protecting the high voltage power supply.

The BD3 is used at chuck shield enclosures,

typically driven by a DR4 high voltage supply mounted in a rack.

BD3 decoupler filter

The BD3 is available in dual-frequency models;

These frequencies should be specified upon ordering.

The maximum rated voltages for the BD3 rev.4 are

WARNING: Earlier models of the BD3 should be upgraded to the Rev.4 revision

... if the full rated 6kV chuck electrode drive is applied, and

... the chuck is chilled.

Download the BD3 manual.