Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, High Voltage Power Supplies, Control Sytems, Vacuum Systems

Electrostatic Chuck Overview:

Chucks grip for micropatterning, temperature control, or robotics ...

Temperature control generally requires a backfill gas,

to conduct heat between substrate and chuck surface.

Rf bias may be required to etch or deposit on the substrate surface.

Extreme temperature ranges may be required for process control,

or extreme surface flatness for focus accuracy.

Substrates will generally be held in vacuum using dipole fields,

but electrostatics may also work well in air, or

through partially conductive materials,

in some cases with multipole excitation.

Special applications include