Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, High Voltage Power Supplies, Control Sytems, Vacuum Systems

'CP' electrostatic chucks all employ a Chuck Puck, bolted onto a Service Base.

A "Chuck Surround" Alumina ring mounts on Chuck Pucks around their active area.

Standard CP chucks operate between -60 and +120 deg. C.

Electrogrip stocks CP chuck bodies, service bases, and surround rings in three size ranges:

CP125 for 76-125mm wafers;

CP200 for 76-200mm wafers;

CP300 for 76-300mm wafers.

CP200 exploded assembly front view witih 150mm chuck size

These pucks can grip

The CP Service Base provides

The CP Service Bases of all sizes have a common connection

requiring an approx. 100mm diameter baseplate mounting hole.

CP200 exploded view on mounting rearside