Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, High Voltage Power Supplies, Control Sytems, Vacuum Systems

Electrogrip Products Overview:

Electrostatic chuck surfaces from Electrogrip may be

Chuck support electronics includes

Gas flow controls are trouble-free:

Chuck integration hardware eases installation into plasma process tools:

Vacuum system design can also be provided

... for all or part of the chuck environment.

DepEtchPro control software permits rapid on-the-fly automation of new tools,

... and can quickly replace and future-proof existing tool control systems.